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A study of the nitridation process on GaAs (001) surface by rf-N plasma irradiation
A study of the nitridation process on GaAs (001) surface by rf-N plasma irradiation
A study of the nitridation process on GaAs (001) surface by rf-N plasma irradiation
Sugiyama, H. (author) / Shinohara, M. (author) / Wada, K. (author)
APPLIED SURFACE SCIENCE ; 117/118 ; 546-550
1997-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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