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Kinetic studies on thermal decomposition of MOVPE sources using fourier transform infrared spectroscopy
Kinetic studies on thermal decomposition of MOVPE sources using fourier transform infrared spectroscopy
Kinetic studies on thermal decomposition of MOVPE sources using fourier transform infrared spectroscopy
Sugiyama, M. (author) / Kusunoki, K. (author) / Shimogaki, Y. (author) / Sudo, S. (author) / Nakano, Y. (author) / Nagamoto, H. (author) / Sugawara, K. (author) / Tada, K. (author) / Komiyama, H. (author)
APPLIED SURFACE SCIENCE ; 117/118 ; 746-752
1997-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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