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Mechanism of stabilizing RuO~2/Ta~2N double layer thin film resistors

Ma, E. / Anderson, W. A.

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Mechanism of stabilizing RuO~2/Ta~2N double layer thin film resistors

Ma, E. / Anderson, W. A.

Mechanism of stabilizing RuO~2/Ta~2N double layer thin film resistors

Ma, E. / Anderson, W. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Mechanism of stabilizing RuO~2/Ta~2N double layer thin film resistors

Contributors:

Ma, E. (author) / Anderson, W. A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 47 ; 161-166

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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