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Fabrication Methods for High Aspect Ratio Microstructures
Fabrication Methods for High Aspect Ratio Microstructures
Fabrication Methods for High Aspect Ratio Microstructures
Watanabe, S. (author) / Esashi, M. (author) / Yamashita, Y. (author)
JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES ; 8 ; 173-176
1997-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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