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Fabrication Methods for High Aspect Ratio Microstructures

Watanabe, S. / Esashi, M. / Yamashita, Y.

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Fabrication Methods for High Aspect Ratio Microstructures

Watanabe, S. / Esashi, M. / Yamashita, Y.

Fabrication Methods for High Aspect Ratio Microstructures

Watanabe, S. / Esashi, M. / Yamashita, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication Methods for High Aspect Ratio Microstructures

Contributors:

Watanabe, S. (author) / Esashi, M. (author) / Yamashita, Y. (author)

Published in:

JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES ; 8 ; 173-176

Publication date:

1997-01-01

Size:

4 pages

ISSN:

1045-389X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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