Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Auger Depth Profiling with Good Depth Resolution of Low Energy Implantation Induced Ion Mixing

    New search for: Sulyok, A.
    New search for: Galisova, A.
    New search for: Menyhard, M.
    New search for: Balogh, A. G.
    New search for: Walter, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Auger Depth Profiling with Good Depth Resolution of Low Energy Implantation Induced Ion Mixing

    New search for: Sulyok, A.
    New search for: Galisova, A.
    New search for: Menyhard, M.
    New search for: Balogh, A. G.
    New search for: Walter, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Auger Depth Profiling with Good Depth Resolution of Low Energy Implantation Induced Ion Mixing

    New search for: Sulyok, A.
    New search for: Galisova, A.
    New search for: Menyhard, M.
    New search for: Balogh, A. G.
    New search for: Walter, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Auger Depth Profiling with Good Depth Resolution of Low Energy Implantation Induced Ion Mixing

    Contributors:

    Sulyok, A. (author) / Galisova, A. (author) / Menyhard, M. (author) / Balogh, A. G. / Walter, G.

    Published in:

    Materials Science Applications of Ion Beam Techniques ; 245-248

    MATERIALS SCIENCE FORUM ; 248/249

    Publication date:

    1997-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Shave-off depth profiling: Depth profiling with an absolute depth scale

    Nojima, M. / Maekawa, A. / Yamamoto, T. et al. | British Library Online Contents | 2006

    Towards quantitative depth profiling with high spatial and high depth resolution

    Vanhove, N. / Lievens, P. / Vandervorst, W. | British Library Online Contents | 2008

    Analysis of Auger sputter depth profiles with a resolution function

    Kitada, T. / Harada, T. / Tanuma, S. | British Library Online Contents | 1996

    Analysis of Auger sputter depth profiles with a resolution function

    Kitada, T. / Harada, T. / Tanuma, S. | British Library Online Contents | 1996

    Depth resolution and preferential sputtering in depth profiling of sharp interfaces

    Hofmann, S. / Han, Y.S. / Wang, J.Y. | British Library Online Contents | 2017

    Back to top