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Towards quantitative depth profiling with high spatial and high depth resolution

Vanhove, N. / Lievens, P. / Vandervorst, W.

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Towards quantitative depth profiling with high spatial and high depth resolution

Vanhove, N. / Lievens, P. / Vandervorst, W.

Towards quantitative depth profiling with high spatial and high depth resolution

Vanhove, N. / Lievens, P. / Vandervorst, W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Towards quantitative depth profiling with high spatial and high depth resolution

Contributors:

Vanhove, N. (author) / Lievens, P. (author) / Vandervorst, W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 1360-1363

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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