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    Highly Focused Ion Beams in Integrated Circuit Testing

    New search for: Horn, K. M.
    New search for: Dodd, P. E.
    New search for: Doyle, B. L.
    New search for: Balogh, A. G.
    New search for: Walter, G.

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    Highly Focused Ion Beams in Integrated Circuit Testing

    New search for: Horn, K. M.
    New search for: Dodd, P. E.
    New search for: Doyle, B. L.
    New search for: Balogh, A. G.
    New search for: Walter, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Highly Focused Ion Beams in Integrated Circuit Testing

    New search for: Horn, K. M.
    New search for: Dodd, P. E.
    New search for: Doyle, B. L.
    New search for: Balogh, A. G.
    New search for: Walter, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Highly Focused Ion Beams in Integrated Circuit Testing

    Contributors:

    Horn, K. M. (author) / Dodd, P. E. (author) / Doyle, B. L. (author) / Balogh, A. G. / Walter, G.

    Published in:

    Materials Science Applications of Ion Beam Techniques ; 427-432

    MATERIALS SCIENCE FORUM ; 248/249

    Publication date:

    1997-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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