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    Focused ion beams and silicon-on-insulator-a novel approach to MEMS

    New search for: Daniel, J. H.
    New search for: Moore, D. F.
    New search for: Walker, J. F.

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    Focused ion beams and silicon-on-insulator-a novel approach to MEMS

    New search for: Daniel, J. H.
    New search for: Moore, D. F.
    New search for: Walker, J. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Focused ion beams and silicon-on-insulator-a novel approach to MEMS

    New search for: Daniel, J. H.
    New search for: Moore, D. F.
    New search for: Walker, J. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Focused ion beams and silicon-on-insulator-a novel approach to MEMS

    Contributors:

    Daniel, J. H. (author) / Moore, D. F. (author) / Walker, J. F. (author)

    Published in:

    SMART MATERIALS AND STRUCTURES ; 9 ; 284-290

    Publication date:

    2000-01-01

    Size:

    7 pages

    ISSN:

    0964-1726

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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