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Numerical study and optimization of chemical vapor deposition process in fabricating zinc selenide films
Numerical study and optimization of chemical vapor deposition process in fabricating zinc selenide films
Numerical study and optimization of chemical vapor deposition process in fabricating zinc selenide films
Vorob'ev, A. N. (author) / Garibin, E. A. (author) / Khoruzhnikov, S. E. (author) / Mironov, I. A. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 47 ; 204-209
1997-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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