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Numerical study and optimization of chemical vapor deposition process in fabricating zinc selenide films

Vorob'ev, A. N. / Garibin, E. A. / Khoruzhnikov, S. E. / Mironov, I. A.

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Numerical study and optimization of chemical vapor deposition process in fabricating zinc selenide films

Vorob'ev, A. N. / Garibin, E. A. / Khoruzhnikov, S. E. / Mironov, I. A.

Numerical study and optimization of chemical vapor deposition process in fabricating zinc selenide films

Vorob'ev, A. N. / Garibin, E. A. / Khoruzhnikov, S. E. / Mironov, I. A.

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Check availability in my library

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Document information

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Document information

Title:

Numerical study and optimization of chemical vapor deposition process in fabricating zinc selenide films

Contributors:

Vorob'ev, A. N. (author) / Garibin, E. A. (author) / Khoruzhnikov, S. E. (author) / Mironov, I. A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 47 ; 204-209

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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