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Micromachined pressure sensors: review and recent developments
Micromachined pressure sensors: review and recent developments
Micromachined pressure sensors: review and recent developments
Eaton, W. P. (author) / Smith, J. H. (author)
SMART MATERIALS AND STRUCTURES ; 6 ; 530-539
1997-01-01
10 pages
Article (Journal)
English
DDC:
530
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