Epitaxial growth of �-SiC thin films on a 6H-SiC substrate using the chemical solution deposition method: Fid-Bau Portal

Epitaxial growth of -SiC thin films on a 6H-SiC substrate using the chemical solution deposition method

Heimann, D. / Wagner, T. / Bill, J. / Aldinger, F. / Lange, F. F.

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Epitaxial growth of -SiC thin films on a 6H-SiC substrate using the chemical solution deposition method

Heimann, D. / Wagner, T. / Bill, J. / Aldinger, F. / Lange, F. F.

Epitaxial growth of -SiC thin films on a 6H-SiC substrate using the chemical solution deposition method

Heimann, D. / Wagner, T. / Bill, J. / Aldinger, F. / Lange, F. F.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Epitaxial growth of -SiC thin films on a 6H-SiC substrate using the chemical solution deposition method

Contributors:

Heimann, D. (author) / Wagner, T. (author) / Bill, J. (author) / Aldinger, F. (author) / Lange, F. F. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 3099-3101

Publication date:

1997-01-01

Size:

3 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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