Preparation of Photosensitive Gel Films and Fine Patterning of Amorphous Al~2O~3-SiO~2 Thin Films: Fid-Bau Portal

Preparation of Photosensitive Gel Films and Fine Patterning of Amorphous Al~2O~3-SiO~2 Thin Films

Zhao, G. / Tohge, N.

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Preparation of Photosensitive Gel Films and Fine Patterning of Amorphous Al~2O~3-SiO~2 Thin Films

Zhao, G. / Tohge, N.

Preparation of Photosensitive Gel Films and Fine Patterning of Amorphous Al~2O~3-SiO~2 Thin Films

Zhao, G. / Tohge, N.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation of Photosensitive Gel Films and Fine Patterning of Amorphous Al~2O~3-SiO~2 Thin Films

Contributors:

Zhao, G. (author) / Tohge, N. (author)

Published in:

MATERIALS RESEARCH BULLETIN ; 33 ; 21-30

Publication date:

1998-01-01

Size:

10 pages

ISSN:

0025-5408

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11 / 620

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