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Efficient and uniform production of III-nitride films by multiwafer MOVPE
Efficient and uniform production of III-nitride films by multiwafer MOVPE
Efficient and uniform production of III-nitride films by multiwafer MOVPE
Deschler, M. (author) / Beccard, R. (author) / Wachtendorf, B. (author) / Schmitz, D. (author) / Juergensen, H. (author)
1997-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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