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In situ reflectance monitoring in MOVPE of a multiwafer reactor

Weeks, K. J. / Irvine, S. J. / Stafford, A. / Jones, S. / Bland, S. / Joel, A.

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In situ reflectance monitoring in MOVPE of a multiwafer reactor

Weeks, K. J. / Irvine, S. J. / Stafford, A. / Jones, S. / Bland, S. / Joel, A.

In situ reflectance monitoring in MOVPE of a multiwafer reactor

Weeks, K. J. / Irvine, S. J. / Stafford, A. / Jones, S. / Bland, S. / Joel, A.

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Check availability in my library

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Document information

Title:

In situ reflectance monitoring in MOVPE of a multiwafer reactor

Contributors:

Weeks, K. J. (author) / Irvine, S. J. (author) / Stafford, A. (author) / Jones, S. (author) / Bland, S. (author) / Joel, A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 80 ; 46 - 49

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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