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Influence of ion energy on the surface morphology of tetrahedral amorphous carbon films

Chen, Z. Y. / Zhao, J. P. / Yu, Y. H. / Wang, X. / Yang, S. Q. / Shi, T. S. / Liu, X. H. / Luo, E. Z. / Xu, J. B. / Wilson, I. H.

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Influence of ion energy on the surface morphology of tetrahedral amorphous carbon films

Chen, Z. Y. / Zhao, J. P. / Yu, Y. H. / Wang, X. / Yang, S. Q. / Shi, T. S. / Liu, X. H. / Luo, E. Z. / Xu, J. B. / Wilson, I. H.

Influence of ion energy on the surface morphology of tetrahedral amorphous carbon films

Chen, Z. Y. / Zhao, J. P. / Yu, Y. H. / Wang, X. / Yang, S. Q. / Shi, T. S. / Liu, X. H. / Luo, E. Z. / Xu, J. B. / Wilson, I. H.

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Document information

Title:

Influence of ion energy on the surface morphology of tetrahedral amorphous carbon films

Contributors:

Chen, Z. Y. (author) / Zhao, J. P. (author) / Yu, Y. H. (author) / Wang, X. (author) / Yang, S. Q. (author) / Shi, T. S. (author) / Liu, X. H. (author) / Luo, E. Z. (author) / Xu, J. B. (author) / Wilson, I. H. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 17 ; 335-338

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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