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Beryllium-Implanted 6H-SiC P^+N Junctions

Ramungul, N. / Zheng, Y. / Patel, R. / Khemka, V. / Chow, T. P.

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Beryllium-Implanted 6H-SiC P^+N Junctions

Ramungul, N. / Zheng, Y. / Patel, R. / Khemka, V. / Chow, T. P.

Beryllium-Implanted 6H-SiC P^+N Junctions

Ramungul, N. / Zheng, Y. / Patel, R. / Khemka, V. / Chow, T. P.

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Order at Subito €

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Document information

Title:

Beryllium-Implanted 6H-SiC P^+N Junctions

Contributors:

Ramungul, N. (author) / Zheng, Y. (author) / Patel, R. (author) / Khemka, V. (author) / Chow, T. P. (author)

Published in:

MATERIALS SCIENCE FORUM ; 264/268 ; 1049-1052

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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