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Effect of rapid thermal annealing on beryllium implanted p-type GaN

Huang, H. W. / Kao, C. C. / Tsai, J. Y. / Yu, C. C. / Chu, C. F. / Lee, J. Y. / Kuo, S. Y. / Lin, C. F. / Kuo, H. C. / Wang, S. C.

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Effect of rapid thermal annealing on beryllium implanted p-type GaN

Huang, H. W. / Kao, C. C. / Tsai, J. Y. / Yu, C. C. / Chu, C. F. / Lee, J. Y. / Kuo, S. Y. / Lin, C. F. / Kuo, H. C. / Wang, S. C.

Effect of rapid thermal annealing on beryllium implanted p-type GaN

Huang, H. W. / Kao, C. C. / Tsai, J. Y. / Yu, C. C. / Chu, C. F. / Lee, J. Y. / Kuo, S. Y. / Lin, C. F. / Kuo, H. C. / Wang, S. C.

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Document information

Title:

Effect of rapid thermal annealing on beryllium implanted p-type GaN

Contributors:

Huang, H. W. (author) / Kao, C. C. (author) / Tsai, J. Y. (author) / Yu, C. C. (author) / Chu, C. F. (author) / Lee, J. Y. (author) / Kuo, S. Y. (author) / Lin, C. F. (author) / Kuo, H. C. (author) / Wang, S. C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 107 ; 237-240

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Yu, C. C. / Chu, C. F. / Tsai, J. Y. et al. | British Library Online Contents | 2001

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Liu, J. / Zhang, T. | British Library Online Contents | 1998

Rapid Thermal Annealing of Ion Implanted Strained Si~1~-~xGe~x

Thomsen, E. V. / Nylandsted Larsen, A. / Hansen, J. L. et al. | British Library Online Contents | 1994

Beryllium-Implanted 6H-SiC P^+N Junctions

Ramungul, N. / Zheng, Y. / Patel, R. et al. | British Library Online Contents | 1998

Thermal Annealing of Light Ion Irradiated Tungsten and Beryllium

Van Veen, A. / Eleveld, H. / Partanen, M. et al. | British Library Online Contents | 1995