Radical Processes in the Pyrolysis of Trialkyl Compounds of Group 13 CVD Precursors: Fid-Bau Portal

Radical Processes in the Pyrolysis of Trialkyl Compounds of Group 13 CVD Precursors

Russell, D. K. / Mills, G. P. / Raynor, J. B. / Workman, A. D.

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Radical Processes in the Pyrolysis of Trialkyl Compounds of Group 13 CVD Precursors

Russell, D. K. / Mills, G. P. / Raynor, J. B. / Workman, A. D.

Radical Processes in the Pyrolysis of Trialkyl Compounds of Group 13 CVD Precursors

Russell, D. K. / Mills, G. P. / Raynor, J. B. / Workman, A. D.

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Check availability in my library

Order at Subito €

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Document information

Title:

Radical Processes in the Pyrolysis of Trialkyl Compounds of Group 13 CVD Precursors

Contributors:

Russell, D. K. (author) / Mills, G. P. (author) / Raynor, J. B. (author) / Workman, A. D. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH- ; 10 ; 61-67

Publication date:

1998-01-01

Size:

7 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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