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    Micromachining and mechanical properties of GaInAs/InP microcantilevers

    New search for: Mounaix, P.
    New search for: Delobelle, P.
    New search for: Melique, X.
    New search for: Bornier, L.
    New search for: Lippens, D.

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    Micromachining and mechanical properties of GaInAs/InP microcantilevers

    New search for: Mounaix, P.
    New search for: Delobelle, P.
    New search for: Melique, X.
    New search for: Bornier, L.
    New search for: Lippens, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Micromachining and mechanical properties of GaInAs/InP microcantilevers

    New search for: Mounaix, P.
    New search for: Delobelle, P.
    New search for: Melique, X.
    New search for: Bornier, L.
    New search for: Lippens, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Micromachining and mechanical properties of GaInAs/InP microcantilevers

    Contributors:

    Mounaix, P. (author) / Delobelle, P. (author) / Melique, X. (author) / Bornier, L. (author) / Lippens, D. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 51 ; 258-262

    Publication date:

    1998-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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