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Formation of polycrystalline silicon with log-normal grain size distribution
Formation of polycrystalline silicon with log-normal grain size distribution
Formation of polycrystalline silicon with log-normal grain size distribution
Bergmann, R. B. (author) / Shi, F. G. (author) / Queisser, H. J. (author) / Krinke, J. (author)
APPLIED SURFACE SCIENCE ; 123/124 ; 376-380
1998-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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