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Two critical thicknesses in the preferred orientation of TiN thin film

Oh, U. C. / Jung Ho Je / Lee, J. Y.

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Two critical thicknesses in the preferred orientation of TiN thin film

Oh, U. C. / Jung Ho Je / Lee, J. Y.

Two critical thicknesses in the preferred orientation of TiN thin film

Oh, U. C. / Jung Ho Je / Lee, J. Y.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Two critical thicknesses in the preferred orientation of TiN thin film

Contributors:

Oh, U. C. (author) / Jung Ho Je (author) / Lee, J. Y. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 13 ; 1225-1229

Publication date:

1998-01-01

Size:

5 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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