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    RHEED analysis of interface growth modes of TiN films on Si(001) produced by crossed beam laser ablation

    New search for: Willmott, P. R.
    New search for: Timm, R.
    New search for: Huber, J. R.

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    RHEED analysis of interface growth modes of TiN films on Si(001) produced by crossed beam laser ablation

    New search for: Willmott, P. R.
    New search for: Timm, R.
    New search for: Huber, J. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    RHEED analysis of interface growth modes of TiN films on Si(001) produced by crossed beam laser ablation

    New search for: Willmott, P. R.
    New search for: Timm, R.
    New search for: Huber, J. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    RHEED analysis of interface growth modes of TiN films on Si(001) produced by crossed beam laser ablation

    Contributors:

    Willmott, P. R. (author) / Timm, R. (author) / Huber, J. R. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 127-129 ; 105-110

    Publication date:

    1998-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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