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RHEED analysis of interface growth modes of TiN films on Si(001) produced by crossed beam laser ablation
RHEED analysis of interface growth modes of TiN films on Si(001) produced by crossed beam laser ablation
RHEED analysis of interface growth modes of TiN films on Si(001) produced by crossed beam laser ablation
Willmott, P. R. (Autor:in) / Timm, R. (Autor:in) / Huber, J. R. (Autor:in)
APPLIED SURFACE SCIENCE ; 127-129 ; 105-110
01.01.1998
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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