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Thickness of Ta~2O~5 thin-films deposited by a new pulsed laser deposition technique
Thickness of Ta~2O~5 thin-films deposited by a new pulsed laser deposition technique
Thickness of Ta~2O~5 thin-films deposited by a new pulsed laser deposition technique
Inoue, N. (author) / Monnaka, T. (author) / Kashiwabara, S. (author) / Fujimoto, R. (author)
APPLIED SURFACE SCIENCE ; 127-129 ; 536-539
1998-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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