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SiC~xN~y thin films alloys prepared by pulsed excimer laser deposition

Machorro, R. / Samano, E. C. / Soto, G. / Cota, L.

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SiC~xN~y thin films alloys prepared by pulsed excimer laser deposition

Machorro, R. / Samano, E. C. / Soto, G. / Cota, L.

SiC~xN~y thin films alloys prepared by pulsed excimer laser deposition

Machorro, R. / Samano, E. C. / Soto, G. / Cota, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

SiC~xN~y thin films alloys prepared by pulsed excimer laser deposition

Contributors:

Machorro, R. (author) / Samano, E. C. (author) / Soto, G. (author) / Cota, L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 127-129 ; 564-568

Publication date:

1998-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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