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Precision laser-based decontamination of microcavities

Durbin, S. M. / Deshmukh, A. V. / Brooks, T. D. / Van de Burgt, L. J.

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Precision laser-based decontamination of microcavities

Durbin, S. M. / Deshmukh, A. V. / Brooks, T. D. / Van de Burgt, L. J.

Precision laser-based decontamination of microcavities

Durbin, S. M. / Deshmukh, A. V. / Brooks, T. D. / Van de Burgt, L. J.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Precision laser-based decontamination of microcavities

Contributors:

Durbin, S. M. (author) / Deshmukh, A. V. (author) / Brooks, T. D. (author) / Van de Burgt, L. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 127-129 ; 810-814

Publication date:

1998-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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