Influence of ion sputtering on the surface topography of GaAs: Fid-Bau Portal

Influence of ion sputtering on the surface topography of GaAs

Asomoza, R. / Merkulova, O. / Merkulov, A. / Vidal, M. A. / Salazar, B.

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Influence of ion sputtering on the surface topography of GaAs

Asomoza, R. / Merkulova, O. / Merkulov, A. / Vidal, M. A. / Salazar, B.

Influence of ion sputtering on the surface topography of GaAs

Asomoza, R. / Merkulova, O. / Merkulov, A. / Vidal, M. A. / Salazar, B.

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Order at Subito €

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Document information

Title:

Influence of ion sputtering on the surface topography of GaAs

Contributors:

Asomoza, R. (author) / Merkulova, O. (author) / Merkulov, A. (author) / Vidal, M. A. (author) / Salazar, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 126 ; 205-212

Publication date:

1998-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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