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    A conceptual design for a microelectronic ionization vacuum gauge

    New search for: Nicolaescu, D.
    New search for: Filip, V.
    New search for: Okuyama, F.

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    A conceptual design for a microelectronic ionization vacuum gauge

    New search for: Nicolaescu, D.
    New search for: Filip, V.
    New search for: Okuyama, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A conceptual design for a microelectronic ionization vacuum gauge

    New search for: Nicolaescu, D.
    New search for: Filip, V.
    New search for: Okuyama, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    A conceptual design for a microelectronic ionization vacuum gauge

    Contributors:

    Nicolaescu, D. (author) / Filip, V. (author) / Okuyama, F. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 126 ; 292-302

    Publication date:

    1998-01-01

    Size:

    11 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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