Fabrication of on-chip barium strontium titanate capacitors by metallo-organic decomposition: Fid-Bau Portal

Fabrication of on-chip barium strontium titanate capacitors by metallo-organic decomposition

Catalan, A. B. / Chang, S.-C. / Poisson, R. J. / Baney, W. J. / Benci, J. E.

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Fabrication of on-chip barium strontium titanate capacitors by metallo-organic decomposition

Catalan, A. B. / Chang, S.-C. / Poisson, R. J. / Baney, W. J. / Benci, J. E.

Fabrication of on-chip barium strontium titanate capacitors by metallo-organic decomposition

Catalan, A. B. / Chang, S.-C. / Poisson, R. J. / Baney, W. J. / Benci, J. E.

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Document information

Title:

Fabrication of on-chip barium strontium titanate capacitors by metallo-organic decomposition

Contributors:

Catalan, A. B. (author) / Chang, S.-C. (author) / Poisson, R. J. (author) / Baney, W. J. (author) / Benci, J. E. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 13 ; 1548-1552

Publication date:

1998-01-01

Size:

5 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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