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Oxidation of spatially controlled atomically flat Si(001) surface

Ando, A. / Sakamoto, K. / Miki, K. / Matsumoto, K. / Sakamoto, T.

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Oxidation of spatially controlled atomically flat Si(001) surface

Ando, A. / Sakamoto, K. / Miki, K. / Matsumoto, K. / Sakamoto, T.

Oxidation of spatially controlled atomically flat Si(001) surface

Ando, A. / Sakamoto, K. / Miki, K. / Matsumoto, K. / Sakamoto, T.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Oxidation of spatially controlled atomically flat Si(001) surface

Contributors:

Ando, A. (author) / Sakamoto, K. (author) / Miki, K. (author) / Matsumoto, K. (author) / Sakamoto, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 130-132 ; 197-201

Publication date:

1998-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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