Control of epitaxial orientation of TiN thin films grown by N-implantation: Fid-Bau Portal

Control of epitaxial orientation of TiN thin films grown by N-implantation

Kasukabe, Y. / Ito, A. / Nagata, S. / Kishimoto, M. / Fujino, Y. / Yamaguchi, S. / Yamada, Y.

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Control of epitaxial orientation of TiN thin films grown by N-implantation

Kasukabe, Y. / Ito, A. / Nagata, S. / Kishimoto, M. / Fujino, Y. / Yamaguchi, S. / Yamada, Y.

Control of epitaxial orientation of TiN thin films grown by N-implantation

Kasukabe, Y. / Ito, A. / Nagata, S. / Kishimoto, M. / Fujino, Y. / Yamaguchi, S. / Yamada, Y.

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Document information

Title:

Control of epitaxial orientation of TiN thin films grown by N-implantation

Contributors:

Kasukabe, Y. (author) / Ito, A. (author) / Nagata, S. (author) / Kishimoto, M. (author) / Fujino, Y. (author) / Yamaguchi, S. (author) / Yamada, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 130-132 ; 643-650

Publication date:

1998-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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