Growth, microstructure, and resistivity of RuO~2 thin films grown by metal-organic chemical vapor deposition: Fid-Bau Portal

Growth, microstructure, and resistivity of RuO~2 thin films grown by metal-organic chemical vapor deposition

Vetrone, J. / Foster, C. M. / Bai, G.-R. / Wang, A. / Patel, J. / Wu, X.

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Growth, microstructure, and resistivity of RuO~2 thin films grown by metal-organic chemical vapor deposition

Vetrone, J. / Foster, C. M. / Bai, G.-R. / Wang, A. / Patel, J. / Wu, X.

Growth, microstructure, and resistivity of RuO~2 thin films grown by metal-organic chemical vapor deposition

Vetrone, J. / Foster, C. M. / Bai, G.-R. / Wang, A. / Patel, J. / Wu, X.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Growth, microstructure, and resistivity of RuO~2 thin films grown by metal-organic chemical vapor deposition

Contributors:

Vetrone, J. (author) / Foster, C. M. (author) / Bai, G.-R. (author) / Wang, A. (author) / Patel, J. (author) / Wu, X. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 13 ; 2281-2290

Publication date:

1998-01-01

Size:

10 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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