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Ultrathin Diblock Copolymer/Titanium Laminates - A Tool for Nanolithography

Spatz, J. P. / Eibeck, P. / Moessmer, S. / Moeller, M. / Herzog, T. / Ziemann, P.

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Ultrathin Diblock Copolymer/Titanium Laminates - A Tool for Nanolithography

Spatz, J. P. / Eibeck, P. / Moessmer, S. / Moeller, M. / Herzog, T. / Ziemann, P.

Ultrathin Diblock Copolymer/Titanium Laminates - A Tool for Nanolithography

Spatz, J. P. / Eibeck, P. / Moessmer, S. / Moeller, M. / Herzog, T. / Ziemann, P.

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Document information

Title:

Ultrathin Diblock Copolymer/Titanium Laminates - A Tool for Nanolithography

Contributors:

Spatz, J. P. (author) / Eibeck, P. (author) / Moessmer, S. (author) / Moeller, M. (author) / Herzog, T. (author) / Ziemann, P. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH- ; 10 ; 849-852

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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