Low energy IBAD: correlation between process parameters and film properties for ion beam assisted evaporation and sputter deposition: Fid-Bau Portal

Low energy IBAD: correlation between process parameters and film properties for ion beam assisted evaporation and sputter deposition

Oechsner, H. / Schafft, M. / Schumacher, A. / Wolff, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Low energy IBAD: correlation between process parameters and film properties for ion beam assisted evaporation and sputter deposition

Oechsner, H. / Schafft, M. / Schumacher, A. / Wolff, D.

Low energy IBAD: correlation between process parameters and film properties for ion beam assisted evaporation and sputter deposition

Oechsner, H. / Schafft, M. / Schumacher, A. / Wolff, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Low energy IBAD: correlation between process parameters and film properties for ion beam assisted evaporation and sputter deposition

Contributors:

Oechsner, H. (author) / Schafft, M. (author) / Schumacher, A. (author) / Wolff, D. (author)

Published in:

MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK ; 29 ; 466-475

Publication date:

1998-01-01

Size:

10 pages

ISSN:

0933-5137

Type of media:

Article (Journal)

Type of material:

Language:

German

Classification:

DDC: 620.11

Vera, E. / Stippich, F. / Meinert, K. et al. | British Library Online Contents | 1998

Ion-beam sputter deposition process for Y~1Ba~2Cu~3O~7~-~ thin-film structures

Krumme, J.-P. / Doormann, V. / Welz, F. et al. | British Library Online Contents | 1994

TiN Coatings Formed by Dual Beam IBAD Technique

Rajchel, B. / Stanek, J. / Wantuch, E. et al. | British Library Online Contents | 1997

Investigation of TiC thin films synthesised by low energy IBAD from electron evaporation of TiC powder

Lopez, J. M. / Gordillo-Vazquez, F. J. / Fernandez, M. et al. | British Library Online Contents | 2001

Influence of Deposition Parameters on the Properties of Titanium Nitride Films Formed by Ion Beam Assisted Evaporation

Wolff, D. / Oechsner, H. | British Library Online Contents | 1998