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    Stress anisotropy and structure of TiN thin films

    New search for: Conradi, T.
    New search for: Hubenthal, F.
    New search for: Roell, K.
    New search for: Stobiecki, T.
    New search for: Thoma, K.
    New search for: Berg, G.
    New search for: Broszeit, E.
    New search for: Bauer, S.
    New search for: Bock, W.
    New search for: Scheib, M.

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    Stress anisotropy and structure of TiN thin films

    New search for: Conradi, T.
    New search for: Hubenthal, F.
    New search for: Roell, K.
    New search for: Stobiecki, T.
    New search for: Thoma, K.
    New search for: Berg, G.
    New search for: Broszeit, E.
    New search for: Bauer, S.
    New search for: Bock, W.
    New search for: Scheib, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Stress anisotropy and structure of TiN thin films

    New search for: Conradi, T.
    New search for: Hubenthal, F.
    New search for: Roell, K.
    New search for: Stobiecki, T.
    New search for: Thoma, K.
    New search for: Berg, G.
    New search for: Broszeit, E.
    New search for: Bauer, S.
    New search for: Bock, W.
    New search for: Scheib, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Stress anisotropy and structure of TiN thin films

    Contributors:

    Conradi, T. (author) / Hubenthal, F. (author) / Roell, K. (author) / Stobiecki, T. (author) / Thoma, K. (author) / Berg, G. (author) / Broszeit, E. (author) / Bauer, S. (author) / Bock, W. (author) / Scheib, M. (author)

    Published in:

    MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK ; 29 ; 476-483

    Publication date:

    1998-01-01

    Size:

    8 pages

    ISSN:

    0933-5137

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    German

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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