A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
New Olefinic Interlevel Dielectric Materials for Microelectronics
New Olefinic Interlevel Dielectric Materials for Microelectronics
New Olefinic Interlevel Dielectric Materials for Microelectronics
Grove, N. R. (author) / Zhao, Q. (author) / Kohl, P. A. (author) / Bidstrup-Allen, S. A. (author) / Shick, R. A. (author) / Goodall, B. L. (author) / McIntosh, L. H. (author) / Jayaraman, S. (author)
ADVANCING MICROELECTRONICS ; 23 ; 16-18
1996-01-01
3 pages
Article (Journal)
English
DDC:
621.381
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