Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Several Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive Sputtering

    New search for: Martin, N.
    New search for: Madjoud, H.
    New search for: Baretti, D.
    New search for: Rousselot, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Several Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive Sputtering

    New search for: Martin, N.
    New search for: Madjoud, H.
    New search for: Baretti, D.
    New search for: Rousselot, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Several Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive Sputtering

    New search for: Martin, N.
    New search for: Madjoud, H.
    New search for: Baretti, D.
    New search for: Rousselot, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Several Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive Sputtering

    Contributors:

    Martin, N. (author) / Madjoud, H. (author) / Baretti, D. (author) / Rousselot, C. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 287/288 ; 327-330

    Publication date:

    1998-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Structural, morphological and electrical properties of nickel oxide thin films deposited by reactive sputtering

    Keraudy, J. / García Molleja, J. / Ferrec, A. et al. | British Library Online Contents | 2015

    Properties of zirconia thin films prepared by reactive magnetron sputtering

    Hembram, K. P. / Mohan Rao, G. | British Library Online Contents | 2007

    Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering

    Peng, Y. / Zhou, J. / Zhao, B. et al. | British Library Online Contents | 2011

    Structural and electrical properties of antiferroelectric lead zirconate thin films prepared by reactive magnetron co-sputtering

    Yamakawa, K. / Wa Gachigi, K. / Trolier-McKinstry, S. et al. | British Library Online Contents | 1997

    Electrical properties and topography of SnO~2 thin films prepared by reactive sputtering

    Brousseau, J.-L. / Bourque, H. / Tessier, A. et al. | British Library Online Contents | 1997

    Back to top