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Several Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive Sputtering
Several Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive Sputtering
Several Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive Sputtering
Martin, N. (Autor:in) / Madjoud, H. (Autor:in) / Baretti, D. (Autor:in) / Rousselot, C. (Autor:in)
MATERIALS SCIENCE FORUM ; 287/288 ; 327-330
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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