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    Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering

    New search for: Specht, C.
    New search for: Schroeder, J.
    New search for: Wittorf, R.
    New search for: Grischke, M.
    New search for: Bewilogua, K.

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    Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering

    New search for: Specht, C.
    New search for: Schroeder, J.
    New search for: Wittorf, R.
    New search for: Grischke, M.
    New search for: Bewilogua, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering

    New search for: Specht, C.
    New search for: Schroeder, J.
    New search for: Wittorf, R.
    New search for: Grischke, M.
    New search for: Bewilogua, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering

    Contributors:

    Specht, C. (author) / Schroeder, J. (author) / Wittorf, R. (author) / Grischke, M. (author) / Bewilogua, K. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 287/288 ; 383-386

    Publication date:

    1998-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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