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    Fluorocarbon Process Gases in Microelectronics

    New search for: Allgood, C. C.

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    Fluorocarbon Process Gases in Microelectronics

    New search for: Allgood, C. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fluorocarbon Process Gases in Microelectronics

    New search for: Allgood, C. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Fluorocarbon Process Gases in Microelectronics

    Contributors:

    Allgood, C. C. (author)

    Published in:

    ADVANCED MATERIALS -DEERFIELD BEACH- ; 10 ; 1239-1242

    Publication date:

    1998-01-01

    Size:

    4 pages

    ISSN:

    0935-9648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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