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    High temperature phase and morphological changes of CVD-SiC films studied using in situ X-ray diffractometry

    New search for: Kingetsu, T.
    New search for: Ito, K.
    New search for: Takehara, M.

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    High temperature phase and morphological changes of CVD-SiC films studied using in situ X-ray diffractometry

    New search for: Kingetsu, T.
    New search for: Ito, K.
    New search for: Takehara, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High temperature phase and morphological changes of CVD-SiC films studied using in situ X-ray diffractometry

    New search for: Kingetsu, T.
    New search for: Ito, K.
    New search for: Takehara, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    High temperature phase and morphological changes of CVD-SiC films studied using in situ X-ray diffractometry

    Contributors:

    Kingetsu, T. (author) / Ito, K. (author) / Takehara, M. (author)

    Published in:

    MATERIALS LETTERS ; 36 ; 284-289

    Publication date:

    1998-01-01

    Size:

    6 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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