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    Mechanism of TiN barrier-metal oxidation in a ferroelectric random access memory

    New search for: Torii, K.
    New search for: Takatani, S.
    New search for: Matsui, Y.
    New search for: Fujisaki, Y.

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    Mechanism of TiN barrier-metal oxidation in a ferroelectric random access memory

    New search for: Torii, K.
    New search for: Takatani, S.
    New search for: Matsui, Y.
    New search for: Fujisaki, Y.

    Access

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    Mechanism of TiN barrier-metal oxidation in a ferroelectric random access memory

    New search for: Torii, K.
    New search for: Takatani, S.
    New search for: Matsui, Y.
    New search for: Fujisaki, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Check availability in my library
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    Document information
    Title:

    Mechanism of TiN barrier-metal oxidation in a ferroelectric random access memory

    Contributors:

    Kushida-Abdelghafar, K. (author) / Torii, K. (author) / Takatani, S. (author) / Matsui, Y. (author) / Fujisaki, Y. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 13 ; 3265-3269

    Publication date:

    1998-01-01

    Size:

    5 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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