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    O~2 plasma oxidation of sputter-deposited Cu thin film during photo resist ashing

    New search for: Myoung Seok Kwon
    New search for: Jeong Yong Lee

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    O~2 plasma oxidation of sputter-deposited Cu thin film during photo resist ashing

    New search for: Myoung Seok Kwon
    New search for: Jeong Yong Lee

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    O~2 plasma oxidation of sputter-deposited Cu thin film during photo resist ashing

    New search for: Myoung Seok Kwon
    New search for: Jeong Yong Lee

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    O~2 plasma oxidation of sputter-deposited Cu thin film during photo resist ashing

    Contributors:

    Myoung Seok Kwon (author) / Jeong Yong Lee (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 135 ; 101-106

    Publication date:

    1998-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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