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    Effect of SiGe thickness on crystallisation and electrical properties of sputtered silicon film in Si/SiGe/insulator structure

    New search for: Jelenkovic, E. V.
    New search for: Tong, K. Y.

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    Effect of SiGe thickness on crystallisation and electrical properties of sputtered silicon film in Si/SiGe/insulator structure

    New search for: Jelenkovic, E. V.
    New search for: Tong, K. Y.

    Access

    Access via TIB
    Check availability in my library
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    Effect of SiGe thickness on crystallisation and electrical properties of sputtered silicon film in Si/SiGe/insulator structure

    New search for: Jelenkovic, E. V.
    New search for: Tong, K. Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Effect of SiGe thickness on crystallisation and electrical properties of sputtered silicon film in Si/SiGe/insulator structure

    Contributors:

    Jelenkovic, E. V. (author) / Tong, K. Y. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 135 ; 143-149

    Publication date:

    1998-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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