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Characterization of zirconia films deposited by r.f. magnetron sputtering

Ben Amora, S. / Rogier, B. / Baud, G. / Jacquet, M. / Nardin, M.

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Characterization of zirconia films deposited by r.f. magnetron sputtering

Ben Amora, S. / Rogier, B. / Baud, G. / Jacquet, M. / Nardin, M.

Characterization of zirconia films deposited by r.f. magnetron sputtering

Ben Amora, S. / Rogier, B. / Baud, G. / Jacquet, M. / Nardin, M.

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Order at Subito €

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Document information

Title:

Characterization of zirconia films deposited by r.f. magnetron sputtering

Contributors:

Ben Amora, S. (author) / Rogier, B. (author) / Baud, G. (author) / Jacquet, M. (author) / Nardin, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 57 ; 30-41

Publication date:

1998-01-01

Size:

12 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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