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GaN films deposited by middle-frequency magnetron sputtering

Zou, C. W. / Yin, M. L. / Li, M. / Guo, L. P. / Fu, D. J.

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GaN films deposited by middle-frequency magnetron sputtering

Zou, C. W. / Yin, M. L. / Li, M. / Guo, L. P. / Fu, D. J.

GaN films deposited by middle-frequency magnetron sputtering

Zou, C. W. / Yin, M. L. / Li, M. / Guo, L. P. / Fu, D. J.

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Check availability in my library

Order at Subito €

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Document information

Title:

GaN films deposited by middle-frequency magnetron sputtering

Contributors:

Zou, C. W. (author) / Yin, M. L. (author) / Li, M. (author) / Guo, L. P. (author) / Fu, D. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 9077-9080

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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