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Synthesis of HMDS radical terminated perhydropolysilazane
Synthesis of HMDS radical terminated perhydropolysilazane
Synthesis of HMDS radical terminated perhydropolysilazane
Shimizu, Y. (author) / Suzuki, K. (author) / Funayama, O. (author)
JOURNAL OF MATERIALS SCIENCE ; 33 ; 5025-5028
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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