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PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING OXIDE FILMS USING SAME
A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N—H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N—H free repeating units having the formula [—N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING OXIDE FILMS USING SAME
A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N—H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N—H free repeating units having the formula [—N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING OXIDE FILMS USING SAME
PERHYDROPOLYSILAZAN-ZUSAMMENSETZUNGEN UND VERFAHREN ZUR HERSTELLUNG VON OXIDFILMEN UNTER VERWENDUNG DERSELBEN
COMPOSITIONS DE PERHYDROPOLYSILAZANE ET MÉTHODES DE FORMATION DE FILMS D'OXYDE LES UTILISANT
SANCHEZ ANTONIO (author) / ITOV GENNADIY (author) / KHANDELWAL MANISH (author) / RITTER COLE (author) / ZHANG PENG (author) / GIRARD JEAN-MARC (author) / WAN ZHIWEN (author) / KUCHENBEISER GLENN (author) / ORBAN DAVID (author) / KERRIGAN SEAN (author)
2022-03-02
Patent
Electronic Resource
English
IPC:
C01B
NON-METALLIC ELEMENTS
,
Nichtmetallische Elemente
/
C04B
Kalk
,
LIME
/
C07F
Acyclische, carbocyclische oder heterocyclische Verbindungen, die andere Elemente als Kohlenstoff, Wasserstoff, Halogen, Sauerstoff, Stickstoff, Schwefel, Selen oder Tellur enthalten
,
ACYCLIC, CARBOCYCLIC, OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
/
C09D
Überzugsmittel, z.B. Anstrichstoffe, Firnisse oder Lacke
,
COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS
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