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Thin film microstructure control using glancing angle deposition by sputtering

Sit, J. C. / Vick, D. / Robbie, K. / Brett, M. J.

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Thin film microstructure control using glancing angle deposition by sputtering

Sit, J. C. / Vick, D. / Robbie, K. / Brett, M. J.

Thin film microstructure control using glancing angle deposition by sputtering

Sit, J. C. / Vick, D. / Robbie, K. / Brett, M. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Thin film microstructure control using glancing angle deposition by sputtering

Contributors:

Sit, J. C. (author) / Vick, D. (author) / Robbie, K. (author) / Brett, M. J. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 1197-1199

Publication date:

1999-01-01

Size:

3 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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