High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements: Fid-Bau Portal

High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements

Jung, K. B. / Hong, J. / Cho, H. / Caballero, J. A. / Childress, J. R. / Pearton, S. J. / Jenson, M. / Hurst, A. T.

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High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements

Jung, K. B. / Hong, J. / Cho, H. / Caballero, J. A. / Childress, J. R. / Pearton, S. J. / Jenson, M. / Hurst, A. T.

High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements

Jung, K. B. / Hong, J. / Cho, H. / Caballero, J. A. / Childress, J. R. / Pearton, S. J. / Jenson, M. / Hurst, A. T.

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Title:

High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements

Contributors:

Jung, K. B. (author) / Hong, J. (author) / Cho, H. (author) / Caballero, J. A. (author) / Childress, J. R. (author) / Pearton, S. J. (author) / Jenson, M. (author) / Hurst, A. T. (author) / Boyd, I. W. / Perriere, J.

Published in:

Proceedings of Symposium G on Surface Processing: Laser, Lamp, Plasma of the 1998 E-MRS Spring Conference - Strasbourg, France, June 16-1998 ; 111-116

APPLIED SURFACE SCIENCE ; 138/139

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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